JPH069009Y2 - 遠心式蒸発源 - Google Patents
遠心式蒸発源Info
- Publication number
- JPH069009Y2 JPH069009Y2 JP2303489U JP2303489U JPH069009Y2 JP H069009 Y2 JPH069009 Y2 JP H069009Y2 JP 2303489 U JP2303489 U JP 2303489U JP 2303489 U JP2303489 U JP 2303489U JP H069009 Y2 JPH069009 Y2 JP H069009Y2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- evaporation
- port
- evaporation source
- centrifugal evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001023 centrifugal evaporation Methods 0.000 title claims description 5
- 238000001704 evaporation Methods 0.000 claims description 63
- 230000008020 evaporation Effects 0.000 claims description 59
- 239000000463 material Substances 0.000 claims description 20
- 238000000034 method Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 16
- 239000000126 substance Substances 0.000 description 5
- 238000010894 electron beam technology Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002390 rotary evaporation Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011882 ultra-fine particle Substances 0.000 description 1
- 239000011364 vaporized material Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2303489U JPH069009Y2 (ja) | 1989-03-02 | 1989-03-02 | 遠心式蒸発源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2303489U JPH069009Y2 (ja) | 1989-03-02 | 1989-03-02 | 遠心式蒸発源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02115560U JPH02115560U (en]) | 1990-09-17 |
| JPH069009Y2 true JPH069009Y2 (ja) | 1994-03-09 |
Family
ID=31241685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2303489U Expired - Lifetime JPH069009Y2 (ja) | 1989-03-02 | 1989-03-02 | 遠心式蒸発源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069009Y2 (en]) |
-
1989
- 1989-03-02 JP JP2303489U patent/JPH069009Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02115560U (en]) | 1990-09-17 |
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